射頻反應磁控濺射法制備TiO-,2-薄膜及其性能研究.pdf

1、分類號UDC密級學位論文射頻反應磁控濺射法制備Ti02薄膜及其性能研究作者姓名：王永杰指導教師：單玉橋教授東北大學材料與冶金學院材料研究所申請學位級別：碩士學科類別：工學學科專業(yè)名稱：材料學滄文提交日期：2006年1月5日論文答辯日期：2006年1月11日學位授予日期：答辯委員會主席：彳匆l美才平閱人：幻聾q，季云勇東北大學2006年1月查些叁芏塑主堂堡壘查一————————壘墮PreparationandPropertiesofTi0

2、2FilmsbyRFReactiveMagnetronSputteringMethodAbstractTie2thinfilmwillhavewidelyapplyingprospectinenvironmentalengineering，biologicalmedicalphysic，materialscienceanddailylivingofpeopleasthematerialofenvironmentalpropeetiona

3、ndphotocatalysis，becauseofithasthevirtuethehighphotocatalytalactivity，highchemicalstabilitylongCOntinuedtime，safeandnopioson，inexpensivecost，andSOonThisexperimentdepositedTie2thinfilmonthemadicalglassbyRFreactivemagnetro

4、nsputteringmethodAtthesametime，wereseachedthetheirpropertiesTheoxygenpartialpressures，substratetemperatures，annealingtemperatures，thehydrothermaltemperaturesandtimethatimpactedonthepropertiesofTie2thinfilmwereinvestigate

5、dXRDwasusedtoinvestigatethecrystalstructureofTie2thinfilmsAFMwasusedtoobservethesurfacemorphologiesofTie2thinfilmsUVVISspectrophotometerwasusedtostudythetransmittanceandabsorptionthresholdofTie2thinfilmsThe20WUVlightlamp

6、wasusedtoobservethatTi02thinfilmsdegradatedtothemethylorangeTheresultsofresearchshow：1Ti02thinfilmshavegoodthecrystalstructureofanataseand100nmgrainsindifferentoxidepartialpressuresThefilmshavewonderfultransnittanceTie2t

7、hinfilmsthathavedegradatedmethylorangeto85％byUVlamplighting75rainwaspreparedat16Paofoxidepartialpressure2Whenthesubstratetemperatureincreases，thecrystalstructureofanatasegraduallydecreases，thecrystalstructureofrufflegrad

8、uallyincreases，thecrystalgrainofthinfilmbecomeslittlebiggerthanbeforeandthinfilmhavebettertransmittance，butthephotocatalyticpropertyhavelightlydeclined3T102thinfilmskeepthecrystalstructureofanataseallalongwithdifferentan